GaAs基MOEMS波长可调谐滤波器的设计和理论模拟

Design and Simulation of a GaAs-based MOEMS Wavelength Tunable Filter

采用传输矩阵理论和结合悬臂梁的电学-机械模型对GaAs基1.55μm微光电机械系统(MOEMS)波长可调谐滤波器的光学和电学特性进行了深入的对比分析和研究。结果表明,采用800 nm厚的空气腔可以实现滤波器波长的调谐范围为100 nm,所需最大反向偏压为4 V,波长的调谐速率可以达到1.83 MHz。

GaAs-based 1.55μm MOEMS wavelength tunable filters are introduced, and the optical and electromechanical properties are simulated by using matrix transmittance theory and a electric-mechanical model of cantilever. The simulation results show that the tuning range can reach 100 nm for an 800 nm air cavity length. The maximum reverse bias voltage is 4 V, and the tuning speed can reach 1.83 MHz.