摘要
本文主要介绍适应加速器的全金属超高真空直接比较校准装置。该装置采用比对法校准，选用性能比较稳定的磁悬浮转子粘滞规作为一级传递标准。在装置的设计、工艺处理等方面具有独到之处，从而获得较好的极限真空和校准结果。
Abstract In this paper, the calibration facility of all metal in ultra high vacuum by direction comparison for the accelerator is described chiefly. This facility uses the comparison calibration, it takes the viscosity gauge of magnetic suspension rotor with stable performance as the first class of transmission standard. Here are unique features in the design and process, so that the good pressure and calibration results can be obtained.
出处
《真空》
CAS
北大核心
1998年第2期15-18,共4页
Vacuum
