离子束辅助沉积(Ti,Al)N 梯度薄膜的结合强度

Adhesions of (Ti,Al)N Gradient Coatings Deposited by IBAD Process

本文采用离子束辅助沉积技术，制备了不同成分梯度的一系列（Ｔｉ１－ｘＡｌｘ）Ｎ膜（其中ｘ＝０．１６～０．４４），并利用刮剥式结合强度测量方法，对薄膜成分对结合强度、内应力、硬度等的影响进行了研究。研究工作发现，刮剥法测得的结合强度，在ｘ＝～０．３１处取得最大结合强度值后，随薄膜成分梯度的增大而下降，但在重要的４０％～５０％Ａｌ区域内，梯度（Ｔｉ，Ａｌ）Ｎ膜的结合强度、硬度以及内应力却都维持在一个较为稳定的水平，较少受薄膜成分等的影响。梯度（（Ｔｉ，Ａｌ）Ｎ膜的结合强度主要受膜中残余应力的影响。

Abstract The(Ti 1-x Al x)N gradient coatings with different composition of (x=0.16～0.44)were deposited by ion beam aided deposition process in this study. The adhesion of the coatings was measured with the scraping test and the effects of the composition on the adhesions, intrinsic stresses and hardnesses were also evaluated. It was found that the adhesion from the scraping test got its highest value at x=～0.31,and thereafter reduced with the increment of composition gradient in the coatings. However, the variation of Al content in (Ti 1-x Al x)N gradient coatings had little influence on the adhesion,hardness and intrinsic stress of the coatings in the important range of 40%～50%Al. The intrinsic stresses in the coating are the most important factors to determine the adhesions of (Ti,Al)N gradient coatings.