薄膜结合强度的刮剥式测量方法

The Scraping Method for Adhesion Measurement of Coatings

本文介绍了一种薄膜结合强度的新型测量方法～刮剥法的测量原理、特点以及应用范围。所谓薄膜结合强度的刮剥式测量方法（简称刮剥法），实际上是一个使用特制刮剥刀具、以类似于薄层金属刮削方式工作，并以从基底上剥离薄膜所需能量作为其结合强度量度的测量方法。刮剥法与现广泛使用的划痕式结合力测量法的区别主要表现为：（１）该法是一个能量测量方法，即以薄膜的剥离能量作为薄膜与基体的结合强度的描述；（２）测量时采用的是对膜／基界面的切向加载方式；（３）测量结果是对膜／基结合强度的直接描述，并对基底表面状态、材质等不敏感；（４）可以对其它方法无法进行测量的超硬材料薄膜，如金刚石和立方氮化硼等，进行结合强度测量。本文通过对刮剥过程中刮剥刀刃附近区域的受力分析，得出了成功实现沿界面剥离薄膜的必要条件以及刮剥法测试对试样的要求和应用范围。

The scraping test, a new method for adhesion measurement of coatings, is introduced in this paper. In the scraping method, coatings are peeled off substrates at the interface of coating/substrate by a knife and the energy consumed in the detachment of coating is used as a measurement of the adhesion strength. Compared with the scratch test, the characteristics of the scraping test can be described as following:(1) It is an energy meaurement mehtod. (2) The interface of coating/substrate is tangentially loaded. (3) The test result directly measures the inherent adhesion of coating/substrate and is insensitive to the substrate, etc.(4) The scraping method can be utilized to test the adhesion of superhard coatings, such as diamond and cBN. This paper also analyses mechanical status ahead the scraping knife, gives out the necessary conditions for the successful scraping test and the requirements for the samples to be tested.