快速前处理TFA-MOD制备YBCO超导薄膜的研究

Study on the growth of YBCO films deposited by rapid pyrolysis process TFA-MOD

三氟乙酸盐金属有机物沉积(TFA-MOD)方法是制备YBa2Cu3O7(YBCO)超导薄膜最有应用前景的方法之一。采用快速前处理TFA-MOD的方法在LaAlO3单晶基片上生长YBCO薄膜并与常规的TFA-MOD方法进行对比研究。XRD分析表明用快速前处理TFA-MOD方法制备的YBCO薄膜的c轴取向一致性,没有常规的TFA-MOD制备的YBCO薄膜好。SEM的分析表明快速前处理TFA-MOD制备的YBCO超导薄膜表面有孔洞和YBCO(103)取向生长的晶粒,常规方法制备的YBCO薄膜表面比较光滑,孔洞较少。虽然较常规方法制备的薄膜的临界电流密度(JC)低,但超导电性能分析表明,快速前处理方法制备的YBCO薄膜JC达到1mA/cm2以上,且前处理时间大幅缩短,对于提高YBCO薄膜制备的效率非常有效。

Trifluoroacetate metal organic deposition （ TFA - MOD） is one of the most promising methods for depositing YBa2Cu3O7 （YBCO） film. In this paper, the rapid pyrolysis process TFA -MOD for growth of YBCO films deposited on （001） LaAlO3 was investigated and compared with traditional TFA - MOD. X - ray diffraction analysis shows that the YBCO films de- posited by the rapid pyrolysis process TFA - MOD have worse e - axis orientation than those deposited by the traditional TFA - MOD. SEM analysis shows that there are lots of pores and YBCO （103） oriented grain duster in films which grew from the rapid pyrolysis process TFA - MOD, whereas the films deposited by the traditional TFA - MOD have less pores and smoother surfaces. Although critical current density decreases compared with that of the films deposited by the traditional TFA - MOD, it still exceeds 1MA/cm2, and the time of pyrolysis process is shortened extremely, so this rapid pyrolysis process TFA - MOD is of great value to deposit YBCO films efficiently.