摘要
单晶基片的生产过程不仅仅是晶体的生长、切割、研磨和抛光,晶体的包装和运输也同样会影响基片的最终质量,有些晶体对存放环境的要求特别苛刻,稍有不慎就会潮解或产生相变,因此研究特殊的包装方法和运输手段是要讨论的主要内容。
It is commonly held that crystal growing , cutting ,lapping and polishing are the basic production process of single crystal substrate, but actually crystal packing and delivery can produce great effect on the quality of single crystal substrate. Some kinds of crystal are very deliquescent and easy to make phase transition because of the unsuitable keeping method. Finding a reliable packing and delivery method will be discussed mainly in the article.
出处
《低温与超导》
CAS
CSCD
北大核心
2009年第4期53-56,共4页
Cryogenics and Superconductivity
关键词
单晶基片
相变
温度检测控制
Single crystal substrate, Phase transition, Thermostatic