摘要
介绍了光纤预制棒的生产工艺以及国内SiCl4蒸发输送系统的技术现状。描述了新型SMR蒸发器的结构特点、技术规格和在SiCl4流量控制方面的优良性能。
A brief introduction of optical fiber preform fabrication process, and the current technical status of vapor delivery system for silicon tetrachloride are presented. The structure, specification and high performance of the new type of SMR evaporator for the flow rate control of silicon tetrachloride are described.
出处
《光纤与电缆及其应用技术》
2009年第2期17-18,21,共3页
Optical Fiber & Electric Cable and Their Applications
关键词
光纤预制棒
蒸发器
SiCl4
optical fiber preform
evaporator
silicon tetrachloride
