摘要
根据快速退火炉加热系统的组成,利用热量传递的基本理论定性地分析了满足热处理工艺指标时加热系统所需的热功率以及影响快速退火系统温度均匀性的因素。在此基础上提出了热源分区的设计思想。
According to the configuration of Rapid Thermal Processing （RTP）, the paper analyzed the heat power that heating system needed during heat treatment processing technology and factors that influenced the temperature uniformity of rapid annealing system. A new ideal of thermal resource to be divided into ten banks was proposed based on that theory.
出处
《工业加热》
CAS
2009年第2期44-46,共3页
Industrial Heating
关键词
快速退火炉
晶片
功率密度
分区
rapid thermal processing
wafer
power density
bank
