激光直写聚合物微流控芯片精密实验台设计

Design of Precision Experimental Table on Laser Direct Writing Grooving Polymer-Based Micro-fluidic Chips

为实验研究CO2激光直写加工聚合物微流控芯片,构建了激光直写微加工精密实验台。为实现高速高定位精度,设计中采用直线电动机直接驱动的伺服进给系统。为保证控制系统的实时性,构建了以工控机为上位机,以PMAC控制卡为下位机的双CPU开放式数控系统。并对精密实验台软件结构进行了模块化设计,成功构建出激光直写微加工精密实验台。

In order to experiment the study on CO2 laser direct-writing machining polymer-based micro-fluidic chip, a laser micro-processing precision experimental table was built. A servo feed system directly driven by linear motor was designed to achieve high speed and high positioning accuracy. In order to ensure real-time control system, dual＇CPU open NC system used Industrial Personal Computer （IPC ） as upper-computer and PMAC card as lower computer was constructed. Software structure of the precision experimental table was modularized designed and a laser micro-processing precision experimental table was successfully constructed.