摘要
本文探讨了一种金属薄膜高温压力传感器的力敏电阻条的制作方法,采用氮化铝作铜衬底和金属力敏电阻条之间的电绝缘层,利用铜金属在高温条件下也能够表现出压阻特性,制作力敏电阻条。通过直流磁控溅射制作力敏电阻条,并引线,封装,进行测试,最后反应出随压力的变化电阻的变化关系。
The fabrication method of the force-sensitive resistor strip for the metal thin film pressure sensor used in high temperature is discussed in this paper. AlN is used as insulation layer between copper substrate and force-sensitive metal resistor strip. Then the copper metal＇s force-sensitive speciality that copper metal can still display the piezoresistance characteristic even under the high temperature condition is taken advantage of. The force-sensitive resistor strip is made by DC magnetron sputtering method and is lead, packaged, test subsequently. The resistance curve changing with the pressure changes is obtained in the end.
出处
《传感器世界》
2009年第4期18-21,共4页
Sensor World
关键词
压力传感器
引线
直流磁控溅射
力敏电阻
pressure sensor
high temperature welding
DC magnetron reactive sputtering
mounting technique
