摘要
双边驱动结构具有行程大、驱动力大、带宽高等优点,在平面两自由度气浮精密/超精密运动台中得到了广泛应用。双边驱动方式通常采用双边测量,这样不仅会导致阿贝误差,同时也会对系统的模型产生影响。本文针对平面两自由度双边驱动气浮精密运动台,通过仿真和辨识实验研究,对系统的共振和反共振问题进行了深入分析,为解决此类双边驱动结构的振动问题提供了理论依据。
This paper investigates the parasitic vibration problems of a kind of dual drive structure. Basic open-loop transfer functions of different vibration types due to the relative location relationships of applied force, sensor location and centroid are described and classified. The validity of the model is verified through simulation and identification experiments of a kind of 2-DOF gantry type air-bearing XY positioning table. The gantry＇s moment of inertia and rotational stiffness ＇s impact on system resonance and antiresonance frequency are discussed in detail.
出处
《机械科学与技术》
CSCD
北大核心
2009年第5期582-586,共5页
Mechanical Science and Technology for Aerospace Engineering
基金
国家自然科学基金项目(50577037)资助
