机构、驱动、检测一体化的压电陶瓷直线驱动模块的研究

Study on Translational Piezoelectric Driving ModuleIntegrating Mechanism,Actuator and Sensor

介绍了一种结构紧凑、具有纳米级位移分辨率、动态性能好的压电陶瓷直线驱动模块。该驱动模块采用了基于弹性变形原理的微位移机构，并在模块内部藏有电阻应变式微位移传感器，实现了＊机构、驱动、检测一体化。

This paper presents a compact translational piezoelectric driving module with nano* displacement resolution and very good dynamic characteristics and the module with a micro displacement mechanism equipped with inner micro sensors based on eastic deformation theory, which integrates mechanism, actuator and sensors.