摘要
非导电的样品用扫描电镜进行观测时需要对样品进行镀膜处理以获得清晰的图像，本文介绍应用脉冲激光沉积（ＰＬＤ）技术对非导电样品的表面进行镀膜处理的方法和实验装置及实验结果．
A nonconducted sample is observed clearly by electron microscorpy, the sample have to be plated a conducted film. In this paper, the technology of pulesed laser diposition (PLD) to plate a carbon film on Electron Microscopy Sample surface is proposed, then the experimant device is discribed and the experiment results are discussed.
出处
《杭州大学学报（自然科学版）》
CSCD
1998年第2期54-57,共4页
Journal of Hangzhou University Natural Science Edition
关键词
脉冲激光沉积
石墨靶
镀膜
电镜
薄膜
pulesed laser diposition
graphite target
preparation of a film
