梳齿式电容加速度传感器的原理和性能分析

Principle & Performance Analysis for Comb-finger Capacitive Acceleration Sensor

以定齿偏置梳齿闭环电容加速度传感器为例,简述了其工作原理,建立了其力学模型。经过分析得到静电力、量程、稳定性、灵敏度等关键物理量的具体表达形式。研究结果表明,加速度传感器的性能和折叠梁的尺寸,检测质量块质量、极板面积、偏置电压、反馈电压等因素有关。本文的研究为电容加速度传感器的进一步优化设计奠定了坚实的理论基础。

This paper takes the closed-loop bias stationary comb-finger variable-capacitance sensor as an example, introduces its operation principle, establishes its mechanics model. Through the analysis, the essential physical expression formula such as electrostatic forces, Input range, stability, resolution are obtained. The results prove that performance of the sensor are connected with the dimension of the beam, the mass, the area of the pole plate, bias voltage, feedback voltage and so on. This work will provide a reliable theoretic foundation for the further optimum design of variable-capacitance acceleration sensor.