期刊文献+
任意字段
题名或关键词
题名
关键词
文摘
作者
第一作者
机构
刊名
分类号
参考文献
作者简介
基金资助
栏目信息

用于激光直写灰度掩模的二元金属薄膜的制备及光学性质 被引量：2

PREPARATION AND OPTICAL PROPERTY OF BIMETALLIC THIN FILMS FOR LASER DIRECT-WRITE GRAY-LEVEL MASK
下载PDF
导出
摘要 利用磁控溅射方法制备了Zn/Al二元金属薄膜,得出了制备Zn/Al二元金属薄膜的工艺参数。论述了其在激光直写灰度掩模中的应用。 Zn/Al bimetallic thin films were prepared on glass substrate by RF magnetr-ron sputtering, and deposition parameters of Zn/Al bimetallic thin films was obtained. Applications for laser direct-write gray-level mask were also discussed.
作者 马锋 王多书 罗崇泰 叶自煜 刘宏开 王济州
机构地区 兰州物理研究所
出处 《真空与低温》 2009年第1期1-4,共4页 Vacuum and Cryogenics
基金 表面工程技术国家级重点实验室基金项目(NO.51418060305HT6007)资助。
关键词 二元金属薄膜 磁控溅射 激光直写 灰度掩模 bimetallic thin film RF magnetron sputtering laser direct writing gray-level mask
分类号 TN214 [电子电信—物理电子学]
  • 相关文献

参考文献10

  • 1王多书,罗崇泰,刘宏开,马勉军,黄良甫.连续型平面衍射聚光透镜掩模的制作[J].应用光学,2005,26(6):77-80. 被引量：3
  • 2王多书,罗崇泰,马勉军,刘宏开,黄良甫.激光直写制作二元光学元件掩模研究[J].应用激光,2004,24(4):213-216. 被引量：5
  • 3马锋 罗崇泰 王多书 等.用于制作衍射元件的全灰度掩模技术.真空与低温,2008,:167-170.
  • 4马锋,王多书,罗崇泰,陈焘,叶自煜,刘宏开,王济州.对衍射光学元件温度特性的研究[J].真空与低温,2008,14(4):193-196. 被引量：1
  • 5李红军,李凤有,于利民,曹颖静,卢振武,廖江红,翁志成.灰度掩模技术[J].微细加工技术,2000(1):10-15. 被引量：13
  • 6史俊锋,张光国,王东生.任意三维表面微型光器件的灰度光刻技术[J].微纳电子技术,2004,41(10):38-43. 被引量：3
  • 7MICHAEL R, WANG, HENG SU. Laser Direct-write gray-level mask and one-step etching for diffractive microlens fabrication[J]. Appl Opt, 1998,37 (10) : 7568 - 7576.
  • 8KOROLKOV VICTOR P, KORONKEYICH VOLDEMAR P. New fabrication method for diffractive Optical elements with deep phase relief[J]. SPIE, 1997,3010:180-191.
  • 9WALTEC DASCHNER, PIN LONG. Cost-effective mass fabrication of multilevel diffractive optical elements by use of a single exposure with a gray-scale mask on high-energy beam-senstive glass[J]. Appl Opt, 1997,36:4675 -4680.
  • 10KLEY E B, THOMA F. Fabrication of micro Optical Surface profies by using gray scale masks[J]. SPIE, 1997,3276: 254-262.

二级参考文献37

  • 1秦洁玉,罗崇泰,马勉军.线性渐变滤光片镀制挡板设计[J].真空与低温,2007,13(1):57-62. 被引量：8
  • 2[1]JIANG H J, YUAN X C, YUN Z S, et al. Fabrication of microlens in photosensitive hybrid sol-gel films using a gray scale mask [J] . Materials Science and Engineering C, 2001, 16:99-102.
  • 3[2]WAGNER B, QUENZER A H J, HENKE W, et al. Microfabrication of complex surface topographies using grey-tone lithography [J] . Sensors and Actuators A, 1995, 46-47 (1-3): 89-94.
  • 4[3]DASCHNER W, LARSSON M, LEE S H. Fabrication of monolithic diffractive optical elements by use of e-beam direct write on an analog resist and single chemically assisted ionbeam-etching step [J] . Applied Optics, 1995, 34 (14):2534-2539.
  • 5[4]GALE M T, ROSSI M, PEDERSEN J, et al. Fabrication of continuous-relief micro-optical elements by direct writing in photoresists [J] . Optical Engineering, 1994, 33 (11): 3556-3566.
  • 6[5]YAO J, CUI Z, GAO F H. Refractive microlens array made of dichromate gelatin with gray-tone photolithography [J] . Microelectronic Engineering, 2001, 57-58: 729-735.
  • 7[6]RANTALAB P A T, LEVYA R, DESCOUR M R. Multilevel structures in sol-gel thin film with a single UV-exposure using a gray-scale mask [J] . Thin Solid Films, 1999, 352 (1-2):9.
  • 8[7]HENKE W, HOPPE W, QUENZER H J. Simulation and process design of gray-tone lithography for the fabrication of arbitrarily shaped surfaces [J] . J Appl Phys Pt 1, 1994, 33(12B): 6809-6815.
  • 9[8]OPPLIGER Y, SIXT P, STAUFFER J M, et al. One-step 3D shaping using a gray-tone mask for optical and microelectronic applications [J] . Microelectronic Engineering, 1994, 23 (1-4): 449-454.
  • 10[9]High Energy Beam Sensitive (HEBS) Glass [EB/OL] .http: //www.canyonmaterials.com/hebsglass.html

共引文献19

同被引文献12

引证文献2

二级引证文献2

真空与低温
2009年 第1期

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部