高压离子轰击源控制与保护研究

Research on control and protection of high voltage glow discharge polymerization source

介绍了真空镀膜设备中高压离子轰击源的电路构成以及在“离子清洗”工艺过程和“离子聚合”工艺过程的工作原理，同时论述了对于过流现象所采取的一些软、硬件保护措施．

The paper introduces the circuit structure of the high voltage glow discharge polymerization source and its working principle in the glow discharge cleaning and the glow discharge polymerization processes, in vacuum coating equipment. Meanwhile, The software and hardware protecting methods for overcoming overcurrent are also discussed.