一种压阻微差压传感器的设计与无应力制造

Design and Non-stress Manufacture of Piezoresistive Low Difference Pressure Transducer

介绍了一种MEMS硅压阻微差压传感器的力学敏感元件设计及无应力制造与封装技术。使用双岛梁膜结构,取得了很高的输出灵敏度及优良的线性度。合理的钝化层应力互补技术是无应力制造技术的核心。衬底强化设计和O型圈悬浮封装的巧妙结合实现了无应力封装。使用这些技术生产的微差压传感器已在多年的生产实践中和重大科研中成功应用。

This paper presented the design and manufacture of an MEMS silicon piezoresistive low difference pressure transducer. Two-leveled islands and beam-diaphragm structure realized high output sensitivity and excellent nonlinearity. Appropriate passivation layer stress complementary technology was the core of non-stress manufacture. Suhstrate strengthen design and O rings suspension package realize well effect non-stress packaging. The micro difference pressure transducers have been successfully used in production and research.