基于微流控技术新型光开关器件设计

Design of New Optical Switches Based on Microfluidic Technology

首先介绍了较为常用的几种光开关的工作原理、特点和应用。描述了MEMS、MOEMS、微流控技术。以MOEMS及微流控技术相接合,提出一种新的微流控光开关阵列结构,通过电控方法改变微流控芯片波导结构,实现光路变化。该光开关具有体积小,结构简单,功率损耗低,有利于光开关阵列集成化、微型化及制作。以电控方式控制光开关,在开关速度上比温控更快、更稳定,且控制电路简单等特点易构成大容量交换矩阵。

This paper introduces basic principles of operations of optical switches and their application in the optical communication. It describes Micro Electron Mechanical System （MEMS）, Micro-Opto-Eleetro-Mechanical Systems （ MOEMS）, and Micro-fluidic technology. A new optical switch array is presented by combining MOEMS with Micro-fluidic control technology. The structure of waveguide in this switch is controlled by electric method. This structure has some characteristics, such as small volume, simple structure, low power consumption, more rapidness, easy-to-control and Easy-to-integrate large-scale switch array with high-performance.