摘要
为了获得性能优良的Ｓｉ３Ｎ４－ＳｉＣ棚板，就棚板制造过程中的配料及成型工艺等问题进行了实验研究，探讨了提高Ｓｉ３Ｎ４－ＳｉＣ棚板坯体密度的最佳途径。实验表明：振动成型时，振动时间和振动压力要匹配适当，才能得到最佳的坯体密度。工艺调整适当后，Ｓｉ３Ｎ４－ＳｉＣ棚板实际使用寿命可达５００次以上。
In order to obtain the superior quality of Si_3N_4SiC shelf,the problems about ingredients and mould techniques in the process of shelf manufacture are experimentalized,and the optimum method to improve the bulk density of green body of Si_3N_3SiC shelf is investigated.The experiments show that the optimum density of green body can be got only if the vibration time matches the vibration bressure during moulding vibration.After the proper adjustment of technique,the Si_3N_4SiC shelf can be used repeatedly above 500 times.
