基于隧道电流检测方式的原子力显微镜纳米检测系统设计

Nano-detection system design of atomic force microscope based on scanning tunnelling microscopy

原子力显微镜(AFM)是当前进行材料表面微观形貌观察及分析的强有力工具之一。本文主要介绍一种隧道显微镜(STM)检测方式的原子力显微镜纳米检测系统(AFM.IPC-208B),该AFM系统设计是在STM.IPC-205B系统设计的基础上,采用隧道电流工作方式,将STM与AFM功能组合兼容。文章详细阐述了AFM.IPC-208B系统的设计原理、镜体、扫描控制以及数据采集。新设计的AFM.IPC-208B系统仍具有0.1nm的分辨率,检测范围为0～2mm×2mm,系统操作简易,工作效率高,与原STM.IPC-205B系统兼容,工作性能稳定可靠。

Atomic force microscope （AFM） is currently a powerful tool of conducting surface observation and Micromorphology analysis. This paper mainly introduces an AFM work system in nanometer, AFM. IPC-208B, its detection mechanism is based on scanning tunnelling microscopy （STM）. This design is based on the system of STM. IPC-205B, and the work principle is testing the tunnelling current, so that we can get the AFM and STM function compatible combination. The design principle, lens body, scanning controller and data collection are elaborated on AFM. IPC-208B system in this paper. This new designed AFM. IPC-208B system still has a good resolution of 0.1 nm, and the detection range can get up to 2 mm ~ 2 ram. Furthermore, this machine operates easily, works effectively, combined with the STM. IPC-205B system, and has stable and reliable performance.