摘要
介绍了一种新型的基于直线相位光栅干涉三维表面形貌测量仪,该测量仪具有高分辨率、大量程、低成本的特点。该三维表面形貌测量仪由基于直线相位衍射光栅干涉原理的微位移传感器、X-Y二维工作台、立柱、光电探测器以及信号处理电路、计算机及数据处理软件组成。该轮廓仪工作台的工作范围为50mm×50mm,最小步距为0.2μm,工作台计量系统的分辨率为0.05μm,微位移传感器理论垂直分辨率可达到0.12nm,实际测量量程为2mm,通过更换测杆可以达到6mm的测量量程。
A high-precision 3 D profilometer for surface metrology with the characteristic of high resolution, long measure range and low cost was introduced. The 3D profilometer consists of several parts,the micro-displacement sensor based on linear phase grating interference, the X-Y 2D platform, the column, the optoelectronic detector and its signal processing cir- cuit,the computer and data processing software. The operating region of the 2D platform is 50 mm- 50 mm. The resolution step displacement of the 2D platform is 0. 2μm and the resolution of the double diffraction grating metrology system of the platform is 0. 05 μm. The theoretical vertical resolution of the micro displacement sensor may achieve 0. 12 nm, and the ac- tual measuring range of the displacement sensor is 2 mm, which can reach 6 mm by replacing the measuring lever.
出处
《润滑与密封》
CAS
CSCD
北大核心
2009年第5期84-86,89,共4页
Lubrication Engineering
