He-Ar潘宁过程对表面波等离子体的影响

Penning Effects on Characteristics of Surface Wave Sustained Plasma

潘宁过程可以有效地降低直流、低频放电中的放电起始电压。关于射频放电,特别是表面波等离子体中的潘宁过程的研究,目前还很少有报道。本文介绍了一种由Ro-box装置激发的SWP源,通过实验方式研究了此装置产生的表面波等离子体柱中的He-Ar潘宁过程对其物理性质的影响。结果表明,合适配比的潘宁气体对于表面波等离子体柱特性有很大影响,它可以有效地降低放电起始功率和放电维持功率,延长等离子体柱长度,提高等离子体密度等;在此过程中电子温度略降低。本研究为在表面波等离子体应用中获取合适的等离子体参量提供了新的途径。

The impact of Penning effect of He-At gaseous mixture on DC and low frequency discharge characteristics of the surface wave sustained plasma（SWP） was experimentally studied with a Langmuir probe. The column-shaped SWP was generated with a lab built setup called ＂Ro-box＂. The results show that the Penning gases significantly affect the SWP characteristics. After a judicious choice of gas composition, the Penning gases considerably lower the spark ignition power and the sustaining power of the discharge; extend the length of the plasma column, and increase the plasma density. However, the electron temperature was founded to decrease slightly.