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前驱体制备与氮化还原法合成AlN粉的物相分析 被引量:3

The X Ray Diffraction Analysis of AlN Powder by Precursor Preparation and Nitrified Carbothermal Reduction Process
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摘要 采用溶胶凝胶工艺制备了铝源和碳源的均匀混合物,分析了铝源与碳源的比例对合成氮化铝物相的影响规律,研究表明,在一定的碳铝比范围内生成很纯的氮化铝粉体,比值较小时含有较多的氧化铝相,较大时含有的碳很难排除完全,并且也容易发生氮化铝粉体的氧化,使纯度降低。对铝源与碳源的混合物通过高温氮化还原煅烧处理,分析了煅烧温度与合成物相的关系,随着温度的提高,形成的氮化铝峰明显增强,直至合成纯的氮化铝相,并与氧化铝通过氮化还原法制备氮化铝粉体的煅烧温度进行了比较,明显降低了合成纯氮化铝粉体的煅烧温度。 A well-proportioned admixture which comprised of source materials such as aluminum and carbon was prepared by sol-gel process. Through x ray diffraction analysis, the patterns showed the effect of the AlN powder transformation on the proportion of aluminum and carbon. It showed that a single phase AlN powder was compounded in a range of proportion of carbon and aluminum, the smaller ratio was corresponding to a little of aluminum oxide, and a bigger ratio brought on the eliminate superfluous carbon duction. The x ray pattern showed that the effect of sintering temperature and time on the synthesized phases.
出处 《真空电子技术》 2009年第2期45-47,50,共4页 Vacuum Electronics
关键词 氮化铝粉体 物相分析 溶胶凝胶工艺 Aluminum nitride powder X ray diffraction analysis Sol-gel process
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