摘要
采用溶胶凝胶工艺制备了铝源和碳源的均匀混合物,分析了铝源与碳源的比例对合成氮化铝物相的影响规律,研究表明,在一定的碳铝比范围内生成很纯的氮化铝粉体,比值较小时含有较多的氧化铝相,较大时含有的碳很难排除完全,并且也容易发生氮化铝粉体的氧化,使纯度降低。对铝源与碳源的混合物通过高温氮化还原煅烧处理,分析了煅烧温度与合成物相的关系,随着温度的提高,形成的氮化铝峰明显增强,直至合成纯的氮化铝相,并与氧化铝通过氮化还原法制备氮化铝粉体的煅烧温度进行了比较,明显降低了合成纯氮化铝粉体的煅烧温度。
A well-proportioned admixture which comprised of source materials such as aluminum and carbon was prepared by sol-gel process. Through x ray diffraction analysis, the patterns showed the effect of the AlN powder transformation on the proportion of aluminum and carbon. It showed that a single phase AlN powder was compounded in a range of proportion of carbon and aluminum, the smaller ratio was corresponding to a little of aluminum oxide, and a bigger ratio brought on the eliminate superfluous carbon duction. The x ray pattern showed that the effect of sintering temperature and time on the synthesized phases.
出处
《真空电子技术》
2009年第2期45-47,50,共4页
Vacuum Electronics
关键词
氮化铝粉体
物相分析
溶胶凝胶工艺
Aluminum nitride powder
X ray diffraction analysis
Sol-gel process