退火炉内壁白色沉积物的电子显微研究

Electron Microanalysis of White Sediments in the Inner Wall of Horizontal Annealing Furnace

针对阴极筒退火过程中在退火炉内壁新产生白色沉积物的现象,利用扫描电子显微镜和能谱仪,分析了该沉积物的结构和成分,并与退火炉在长期退火过程中在内壁形成的原有深色沉积物进行对比研究。结果表明,形貌上白色沉积物荷电现象不明显,成分上主要以C,N,O等元素为主,白色沉积物粉末状的原因为前期电镀工艺结束后未清洗干净的残留镀液在高温下挥发所致。根据分析结果改进清洗工艺,避免了白色沉积物的再次出现。

To elucidate the phenomena of new white sediments occurred in the inner wall of horizontal annealing furnace during in the process of annealing for cathode tube, the difference of microstructures and component between white sediments and fuscous sediments that had been in existence in the process of anneal in the inner wall of horizontal annealing furnace with SEM and EDS was analyzed. Experimental results revealed that it was not evident for deposited electricity and was composed of element C, N, O. The difference was due to volatile rudimental electroplating liquid in hot temperature that was not cleaned completely after prophases electroplate arts and crafts. According to the analysis we suggested that it would to be better to improve the cleaning technique, experiment results significantly avoided the phenomena.