磁场沉积态FeCuCrVSiB薄膜的软磁特性和巨磁阻抗效应

SOFT MAGNETIC PROPERTIES AND GIANT MAGNETOIMPEDANCE EFFECT IN MAGNETIC FIELDDEPOSITED FeCuCrVSiB FILMS

采用射频溅射法,在无磁场和施加72 kA/m的纵向磁场下制备了FeCuCrVSiB软磁合金薄膜样品,对沉积态样品的软磁特性和巨磁阻抗(GMI)效应进行了测量和分析.结果表明,在制备过程中加磁场可明显改善材料的软磁性能,与无磁场沉积态相比,样品的矫顽力从1.080 kA/m降低到0.064 kA/m,在13 MHz频率下有效磁导率比从10%增加到106%.GMI效应与磁导率比的大小密切相关.无磁场沉积态样品没有检测到GMI效应,而磁场沉积态样品则具有显著的GMI效应.在13 MHz的频率下,最大纵向和横向巨磁阻抗比分别高达22%和20%.这些结果都优于厚度几乎相同的退火态FeCuNbSiB薄膜的GMI特性.

FeCuCrVSiB soft magnetic films have been prepared using radio frequency sputtering without or with a constant magnetic field of about 72 kA/m along the longitudinal direction of film plane, and then their soft magnetic properties and giant magnetoimpedance （GMI） effects were measured. The results obtained show that the magnetic field applied during the deposition process improves significantly the soft magnetic properties of the sample. For example, its coercive force decreases from 1.080 kA/m of the non-field-deposited state to around 0.064 kA/m and its effective permeability ratio increases from 10% to 106%. The GMI effect is closely connected with this permeability ratio. The GMI effect can not almost be detected in non-field-deposited samples, while it becomes evident for field-deposited samples. The maximum values of longitudinal and transverse GMI ratios are 22% and 20% at the frequency of 13 MHz, respectively. The GMI effect in the field-deposited sample is much better than in annealed FeCuNbSiB film with the same thickness.