硅微电容式加速度计的闭环控制技术研究

Research of Silicon Micro-capacitive Accelerometer's Closed Loop Control Technique

论述了闭环控制的原理,即通过静电力反馈来实现平衡控制。并通过计算保证了闭环控制系统的稳定性。可见,闭环工作下的电容式加速度计的稳定性、精度和线性度等都得到了提高。

In this paper, the fundamental of closed loop control was discussed, which is through the feedback of electrostatic force to realize the balance control. Through the analyse of closed loop system to assure the stability of system. We can see that the stability, precision and linearty of capacitance accelerometer are improved in the closed loop state.