AlN-堇青石玻璃复合材料的介电性能

Dielectric properties of AlN-cordierite glass composites

为了研究热压温度和AIN含量对AIN-堇青石玻璃复合材料烧结和介电性能的影响，采用真空热压方法在900-1000℃低温烧结制备AIN-堇青石玻璃复合材料．利用X射线衍射、扫描电镜和阻抗分析仪对复合材料的微结构和介电性能进行了研究．结果表明，随着热压温度的提高，复合材料的相对密度增加，复合材料的介电常数和介电损耗减少；在一定的热压温度下，复合材料的介电常数和介电损耗随着AIN引入量的增加而增加．从复合材料的相组成和结构角度对以上结果予以解释，提高热压温度和增加α-堇青石数量均有利于降低复合材料的介电常数和介电损耗．制备的复合材料具有低的介电常数（5．6-6．5）和低的介电损耗（≤10^-3），有望用于微电子封装领域．

AIN-cordierite glass composites were fabricated by hot-press sintering in vacuum at low temperatures of 900 - 1000 °C. The influences of hot-pressing temperatures and volume percent of AIN on the micro- structure and dielectric properties of the composite materials were investigated by XRD, SEM and LCR multi- function meter. The results show that with the increase of hot-press temperature, the relative density of composites is increased, and the dielectric constant as well as the dielectric loss is decreased. While at the same hot-pressing temperature, the dielectric constant and the dielectric loss of the composites are increased with the increasing contents of AIN. The obtained results were discussed from the viewpoint of phase composition and microstructure of the composites. Both elevating hot-press temperatures and increasing the amount of α-cordierite phases are in favor of reducing the dielectric constant and dielectric loss of the composites. The prepared composites have low dielectric constant of 5.6 - 6.5 and low dielectric loss of 0. 001, which can be suitable for microelectronic packaging.