固着磨料抛光碳化硅反射镜的去除函数

Removal function of computer controlled polishing SiC mirror with fixed abrasive

进一步研究了采用固着磨料数控加工碳化硅反射镜的工艺,基于平转动加工方式的去除函数理论推导出了多丸片抛光盘的去除函数模型。根据趋近因子、曲线距离等结果对抛光盘运动偏心距及丸片间距等参数进行优化,由优化后的参数指导实验。理论模型与实验结果对比显示,理论最大去除率与实验数据的偏差为0.007 3μm/min,偏差比例为5.58%;理论去除函数曲线与实验曲线的距离偏差Drms为0.084 9μm,偏差比例为7.01%。在分析部分,引入填充因子来间接评价去除函数形状。实验结果很好地验证了理论模型的准确性。该模型对固着磨料磨具抛光的工艺过程具有很好的预测性,在加工碳化硅反射镜领域极大地弥补了使用散粒磨料工艺加工所带来的不足,使加工效率得以明显提升。

A new computer controlled polishing technology called the fixed abrasive machining technology is described in this paper, and a removal function model for multi-pellet polishing pads is established based on the removal function theory of plane motion. The parameters of the model,motion deflection distance of the polishing pad and the distance between pellets and pellets are optimized by a approaching factor and a curve rms distance to use in experiments. The comparison of the theoretical model and the experimental results show that the error between the theoretical maximum removal rate and the experiment data is 0. 007 3 μm/min, and its deflection ratio is 5.58% . The rms distance warp between the theoretical removal function curve and the experimental curve is 0. 084 9 μm and its deflection ratio is 7. 01%. The veracity of the theoretical model is verified by experimental results, which can predict the feasibility of the fixed abrasive polishing technology and can lay a foreground for the SiC mirror precision fabrication field.