大面积激光投影成像曝光技术

Laser Projection Image Exposure Technology in Large Area

介绍了大面积激光投影成像曝光系统的构成和工作过程,阐述了其中的关键核心技术如激光照明光学技术、折叠投影光学技术、大面积扫描技术和光学自动对准技术,分析了光学系统的参数、配置以及光路设计等存在的问题,对大面积扫描中的无接缝误差和自动对准中的高精度检测定位等技术上的解决办法作了有益的探讨。

For the system of a large-area laser projection image exposure, its constitution and working progress are introduced. The key technologies, such as laser illumination optical technology, projection lens optical technology, large-area scanning technology, and optical automatic alignment technology, are expounded. It is analyzed for the existing problem in the optical system including the parameters, disposition, and optical path design, etc. Meanwhile, it is discussed for the technologically solution about the seamless error in the large area scan as well as the high-precision metrology and positioning in the automatic alignment.