专家PID温度控制在高真空磁控溅射镀膜机中的应用研究

Study On Expert PID Temperature Control in High Vacuum Magnetron Sputtering Coating Machine

高真空磁控溅射镀膜机的温度控制在镀膜过程中起着十分重要的作用,温度控制的好坏直接影响到成膜质量。本文研究了专家PID算法的原理和实现方法,并将其应用到温度控制系统中;就常规PID算法和专家PID算法在温度控制上的应用开展了仿真比较;设计和实现了基于专家PID算法的高真空磁控溅射镀膜机温度控制系统。事实表明,基于专家PID算法的温控系统可以对镀膜室温度实现很好的控制。

Temperature control of high vacuum magnetron sputtering machine plays a very important role in the process of coating, and temperature control has a direct impact on the quality of film. This paper studies the experts＇ PID algorithm principle and the realization method; applies it to the temperature control system~ and makes a simulation comparison with conventional PID algorithm and experts＇ PID algorithm in the application of temperature control. The paper designs a high vacuum magnetron sputtering machine temperature control system based on experts＇ PID algorithm. The results of experimentation show that the experts＇ PID can fully meet the use of temperature control requirements of high vacuum magnetron sputtering machine.