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单晶硅表面稀土复合纳米膜的制备与摩擦特性 被引量:1

The Preparation and Friction Behavior of Rare-Earth Composite Film on Silicon
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摘要 利用分子自组装技术,在单晶硅表面制备了稀土复合纳米自组装膜.运用原子力显微镜(AFM)观察了薄膜的表面形貌,使用X射线光电子能谱仪(XPS)分析了薄膜表面典型元素的化学状态,并运用静-动摩擦系数测定仪评价了薄膜的摩擦磨损性能.研究结果表明:通过硅烷偶联剂3-巯丙基三甲氧基硅烷(MPTS)的磺酸基化学吸附功能,稀土元素可以成功组装到氧化后的硅烷化表面.当组装稀土复合膜后,基片表面的摩擦系数由无膜时的0.8降到了0.08,表明复合膜可以降低基片的摩擦系数,并且在较低载荷下具有较好的耐磨性能. Rare -earth nano -composite films were prepared on the hydroxylated silicon substrate by selfassembling. The morphologies of the samples were studied by atomic force microscopy (AFM). Chemical compositions of the films were determined by X - ray photoelectron spectroscopy (XPS). And the nanotribological properties of the films were investigated on a static - dynamic tribo - tester. The results indicated that lanthanum - based thin films were deposited on the oxidized MPTS - SAM successfully due to the chemisorption ability of - SO3 H group. The lanthanum -based SAMs can reduce the friction coefficient of substrate and provide good wear resistance under a low load.
出处 《摩擦学学报》 EI CAS CSCD 北大核心 2009年第3期210-214,共5页 Tribology
基金 国家自然科学基金资助项目(50775139 50475023)
关键词 3-巯丙基三甲氧基硅烷 稀土 自组装纳米膜 摩擦磨损性能 3 - mercaptopropyl trimethoxysilane, rare earth (RE) , self - assembled nanofilm, friction and wear behavior
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