钛合金表面离子束辅助沉积 CuNiIn 固体润滑膜和 Cr-N 硬质膜

Ionbeamassisted Deposition of CuNiIn Solid Lubricating

在钛合金表面利用离子束辅助沉积（ＩＢＡＤ）技术沉积ＣｕＮｉＩｎ固体润滑膜和ＣｒＮ硬质膜层，分析、测定了膜层的组织结构、成分分布、形貌特征及摩擦磨损性能。结果表明，ＩＢＡＤＣｕＮｉＩｎ在室温和５００℃均可为ＴＣ４合金表面产生良好的固体润滑效果，各项性能显著优于传统电镀Ａｇ方法。ＩＢＡＤＣｒＮ膜为ＣｒＮ和Ｃｒ双相组织，在室温和５００℃可有效地改善ＴＣ４合金表面的耐磨性能。

Tang Bin He Jiawen(Xi′an Jiaotong University) CuNiIn soft film and CrN hard film were deposited on titanium alloys by ionbeamassisted depositionCuNiIn film provides satisfactory lubrication properties for titanium alloy and CrN film protects the substrate by maintaining integrity at both room temperature and 500℃