多晶硅清洗设备研究

Study of Polysilicon Etching Equipment

介绍了多晶硅清洗设备,即:硅块、硅棒/硅芯清洗设备。并对其结构设计进行阐述。对设备关键部件—工艺槽、机械臂的设计进行了详细的说明。该设备满足了大规模生产的需要,能够保证产品的品质及生产效率。

The main content of this paper is to introduce two types of polysilicon etching equipment： block etching equipment and bar etching equipment, and expatiate on the constructure design of the equipment. The design method of key parts, including process tanks and robot, are described detailed in this paper. The equipment meet the need of mass production, and ensure the quality of products and productive efficiency.