摘要
文章用几何光学原理分析了反射光强与表面涂层厚度及均匀度的关系,提出一种用于检测物体表面涂层均匀度的方法。该传感器能针对物体表面涂层的随机性实现不同区域涂层均匀度的在线测试。在理论分析的基础上,构建了实验测试系统。数据表明,采用该传感器进行测试能反映表面涂层均匀度的变化,测试精度可达10μm,具有良好的应用前景。
This paper introduces a new method for testing the coating uniformity of object surface coating uniformity on the basis of analyzing the interrelations between reflective optical power and object surface coating thickness and uniformity on the basis of the principle of geometrical optics. To fit in with the randomness of surface coating, this sensor can he used for online tests on coating uniformity in different areas. On the basis of theoretical analysis, it sets up an experimental testing system. The test results show thai changes in the uniformity of surface coating can be reflected by using this sensor with an accuracy of as high as 10 μm, holding out a good prospects for practical application in the future.
出处
《光通信研究》
北大核心
2009年第3期49-50,64,共3页
Study on Optical Communications
基金
广西科技厅项目(桂科基0639058)