摘要
采用射频磁控溅射法在双面抛光Si(100)基片上制备了类金刚石薄膜,通过磁过滤等离子体化学气相沉积法,以N2、H2混合气体为反应溅射气体,对类金刚石薄膜样品表面进行氨基改性。傅立叶变换红外透射光谱(FT-IR)的结果表明,改性后的类金刚石薄膜上有C—NH2键存在;光电子能谱(XPS)的结果表明,改性后的薄膜表面含氮量约为8.92%,N1s的结合能出现在氨基对应的结合能范围内,表明类金刚石薄膜经过适当改性后可以在薄膜表面产生氨基。
Diamond-like carbon ( DLC), a form of amorphous carbon ( a-C ) of a network of sp2 and spa bonding coordinations was prepared by radio frequency (RF) magnetron sputtering from high pure graphite target (99.99%), on double-side polished Si (100) surface. The film was modified by mag- netic-filtered plasma stream sputtering from a high purity graphite cathode in a mixture of nitrogen gas and hydrogen gas( 1 : 2 in volume). The microstructures of the DLC film was characterized by Fou- rier transform infrared spectroscopy ( FT - IR) and X-ray photoelectron spectroscopy (XPS). FT - IR results showed that the C--NH2 groups exist on the modified surface. XPS results verified that the content of N on the modified surface was about 8.92%. N1 s binding energies emerged correspondingly to the range of amino groups binding energy. All the resuhs indicated the existence of the amino groups on the modified surface.
出处
《分析测试学报》
CAS
CSCD
北大核心
2009年第5期601-604,共4页
Journal of Instrumental Analysis
基金
国家自然科学基金资助项目(4103019
4103261)
广东省自然科学基金资助项目(8151027501000076)