类金刚石薄膜表面的氨基修饰

Modification of Amino Groups on the Diamond-like Carbon Film

采用射频磁控溅射法在双面抛光Si(100)基片上制备了类金刚石薄膜,通过磁过滤等离子体化学气相沉积法,以N2、H2混合气体为反应溅射气体,对类金刚石薄膜样品表面进行氨基改性。傅立叶变换红外透射光谱(FT-IR)的结果表明,改性后的类金刚石薄膜上有C—NH2键存在;光电子能谱(XPS)的结果表明,改性后的薄膜表面含氮量约为8.92%,N1s的结合能出现在氨基对应的结合能范围内,表明类金刚石薄膜经过适当改性后可以在薄膜表面产生氨基。

Diamond-like carbon （ DLC）, a form of amorphous carbon （ a-C ） of a network of sp2 and spa bonding coordinations was prepared by radio frequency （RF） magnetron sputtering from high pure graphite target （99.99%）, on double-side polished Si （100） surface. The film was modified by mag- netic-filtered plasma stream sputtering from a high purity graphite cathode in a mixture of nitrogen gas and hydrogen gas（ 1 ： 2 in volume）. The microstructures of the DLC film was characterized by Fou- rier transform infrared spectroscopy （ FT - IR） and X-ray photoelectron spectroscopy （XPS）. FT - IR results showed that the C--NH2 groups exist on the modified surface. XPS results verified that the content of N on the modified surface was about 8.92%. N1 s binding energies emerged correspondingly to the range of amino groups binding energy. All the resuhs indicated the existence of the amino groups on the modified surface.