摘要
主要就简易匀胶机系统的结构设计、控制电路设计、技术特点、工作原理、性能、应用场合、影响质量的关键因素等进行了阐述。
This paper mainly absorbed on the simple structure of gel system design,circuit control design,technical features,working principle, performance, applications, the key factors affecting the quality.
出处
《现代显示》
2009年第6期41-44,共4页
Advanced Display
关键词
匀胶机
涂胶
光刻
spin coater
coating
photoresist