微波ECR氧等离子体参数测量

Measurement of microwave ECR oxygen plasma parameter

利用双探针对微波ECR氧离子体参数进行了诊断研究,测量了等离子体的双探针伏安曲线并计算出电子温度和离子密度,分析了气压、微波功率、氧气流量等参数对等离子体参数的影响.结果表明:a.随着气压的升高,等离子体密度先增大后减小,电子温度逐渐减小.b.等离子密度随微波功率的增加先增加后达到饱和,电子温度受微波功率影响很小.c.随着氧气流量的增加,等离子体密度和电子温度都减小.

The microwave ECR plasma parameter has been diagnosed using dobule Langmuir probes. The Ⅰ-Ⅴ characteristics of dobule probes were measured and its electronic temperature, plasma density were caculated. The effects of gas pressure, micromave power and oxygen current on the plasma parameters were analysed. The results indicated that： （1）With the increasing of gas pressure, plasma density increased and then decreased and electronic temperature gradually decreased. （2）Plasma density increased and then saturated as the microwave power was increased, electronic temperature had a very small impact on microwave power. （3）With the increasing of the flow of oxygen, plasma density and electronic temperature reduced.