基于光子晶体高级次反射膜空间解复用器的研究

Based on High-Level Reflectivity Thin Film Spatial Demultiplexer Research

由于实际中多周期高反射膜空间解复用器的制备工艺的难度,根据"超棱镜"效应的多层薄膜空间解复用器的设计方法,提出了一种制备工艺简单的多层薄膜结构,以此来降低制备的工艺难度。制备通过增加周期中单层膜的级次来减少整个高反射膜系的周期数。所设计的高级次反射膜系为10(9H9L)9H,对设计的膜系进行了数值模拟计算,并和相同总物理厚度的一级次高反射膜系进行了比较。计算结果比较表明,该设计方法明显降低了工艺设计的要求,并具有较大的空间色散和实际制备意义。

A new design method for multilayer thin film spatial demultiplexer based on Superprism phenomenon of periodic photonic crystal was presented. Without complex techniques the multilayer thin film structure was deposited easily with increasing the thickness of the single layer and decreasing the periodicity. The high-level relectivity thin film stack as 10（gHgL）gH was designed. By the above method and compared with the classic low-level high reflectivity thin film stack of the same geometric thickness, the numerical simulation and the computational results show that the spatial dispersion is large and the designed multiplayer structure is more feasible in practice for fabrication.