反应等离子喷涂TiN涂层热处理后力学性能研究

Mechanical Property of TiN Coating Prepared by Reactive Plasma Spraying after Heat Treatment

用反应等离子喷涂方法制备了厚度约为500μm的TiN陶瓷涂层,而后对其进行在不同温度,时间,保护气氛下的退火处理,并对涂层的硬度,断裂韧性及残余应力进行了测量。借助SEM对涂层形貌进行了表征,采用XRD测量涂层的残余应力。结果表明:在大气中600℃退火后,涂层硬度最高。而在Ar800℃处理后,涂层韧性有了明显的改善。涂层残余应力为压应力,并且涂层内的残余应力随着热处理温度的升高而增大。

TiN coating of about 500 μm thickness is prepared by reactive plasma spraying, and the coating is annealed at different temperatures, for different time and in different protective atmospheres. The microhardncss, fracture toughness and residual stress of the coating is tested. The microstructures of the coating are observed by SEM, and the residual stress was tested by XRD. The results show that the increase of microhardness of the coating is most obvious after heat treatment in atmosphere at 600 ℃, and the fracture toughness is improved obviously in Ar atmosphere at 800 ℃. The residual stress of the coating is compression stress, and it is increased with the increase of the heat treatment temperature.