精密微小孔激光测量方法

Microhole Diameter Measurement Method

提出了一种测量微小孔的方法，该系统由半导体激光器，步进电机驱动的二维工作台，以微型计算机为基础的控制电路组成，激光头将激光束聚焦在被测工件表面并立即反射回来，反射的光束经过一光学组件到达四象限探测器，工件表面以及孔反射的光通量不同，四象限探测器将光通量转化为电流，此电流送至接口电路及微型计算机处理。实验表明该方法能可靠地获得精密微小孔的测量值。

A method measuring microhole diameter is presented in this paper.To perform measurement,a measuring system is developed,which consists of laser sensor head,2Dtable,driven by step motors,driven and control circuits based on single chip microcomputer etc.The laser sensor head focus the beam on the measured piece.The reflected light is passed through the optical components before reaching four phase photodiode.The photodiode converts the light into current.The current is different between microhole and surface on the piece,and would be processed and controlled through interface and single chip microcomputer.The experiment showed the reliability to obtain the accurate diameter of microhole.