45°角入射的13.1nm软X射线多层膜的研制

Deposition and Absolute Reflectivity Measurements of a Mo/Si Multilayerfor 13.1 nm Soft Xray at 45° Incidence Angle

报道了对４５°入射角高反的１３．１ｎｍ软Ｘ射线多层膜反射镜的研制情况。利用在星光装置中进行的软Ｘ射线激光等离子体实验测量多层膜反射率的方法，获得了２６．２％的实测反射率，该反射率已达到理论反射率的７０％。

Reported here is a result of absolute reflectivity measurement carried out in a soft Xray laser plasma experiment. A 26.2% reflectivity Mo/Si multilayer for 13.1 nm soft Xray at the 45° incidence angle is obtained.