一种朗琴尺型激光光束参量测量仪

An Instrument of Ronchi Ruling Type forMeasuring Laser Beam Parameters

针对气体激光器细光束的尺寸参数的工业测量和质量控制，提出一种朗琴栅尺扫描ＴＥＭ００基模高斯激光光束的测量分析仪。所研制的仪器可以测量分析光斑１／ｅ２直径、横场分布和调制对比度等光束参数，特别是可以在近场测定１／ｅ２光束远场发散角。描述了该仪器的基本原理、结构及测量结果。

An analyzing instrument of the Ronchi ruling type for measuring TEM00 made Gaussian beam parameters of lasers in quality control in industry is described. The instrument can be used to measure crossfield distrbution of a Gaussian beam and used in the measurements of the 1/e2 beam diameter and the farfield beam divergence in the near field. The basic principle of the measurement and the experimental results are reported.