高分辨力光学微扫描显微热成像系统设计与实现

Design and implementation of optical micro-scanning thermal microscope imaging system with high resolution

为提高已研制的基于非制冷焦平面探测器的显微热成像系统的空间分辨力,研究提出了一种基于光学平板旋转微扫描器的高分辨力显微热成像系统。分析了光学平板旋转微扫描的工作原理,给出了微扫描器相关的参数设计、加工容差,并与现有的非制冷显微热成像系统实现了一体化设计与加工,确定了光学微扫描显微热成像系统的技术指标。利用该系统实际采集的显微热图像与过采样处理结果表明系统整体设计的有效性,系统空间分辨力得到提高,可应用于高分辨力显微热分析。

To improve the spatial resolution of the developed thermal microscope based on the uncooled focal plane arrays, a novel high resolution thermal microscope imaging system with optical plate rotating micro-scanner is designed. The working principle of the optical plate rotating micro-scanner is analyzed. Moreover, the parameter design, the error analysis, the process tolerance, the technical parameters and the composition of the whole system are all given. The results of standard oversample reconstruction for real thermal microscope images show that the design of system is successful and achieves higher resolution. The system can be applied into many systems which need high spatial resolution.