摘要
本文阐述了位相轮廓的测量原理,在此基础上,对三维面形测量系统进行了设计,给出了测量结果,并对结果进行了讨论.
The principle of 3-D profile testing by phase shift is described. A profile testing system is designed on 3-D object surface shape. The experimental results are presented.
出处
《传感器世界》
1998年第6期24-26,23,共4页
Sensor World
关键词
轮廓测量
三维面形
测量
位相轮廓
phase shift, profilometry, 3-D profile measurement
