摘要
An investigation was made into the argon plasma jet that expanded in a low-pressure vacuum chamber. The spatial distributions of the parameters of the plasma jet with different supplied powers were measured using a ten-channel Langmuir probe array. The chemical species in the plasma jet were identified by emission spectroscopy. The electron excitation temperatures at two positions, 10 cm and 50 cm downstream from the nozzle exit were calculated, respectively, by the Boltzmann plot method.
An investigation was made into the argon plasma jet that expanded in a low-pressure vacuum chamber. The spatial distributions of the parameters of the plasma jet with different supplied powers were measured using a ten-channel Langmuir probe array. The chemical species in the plasma jet were identified by emission spectroscopy. The electron excitation temperatures at two positions, 10 cm and 50 cm downstream from the nozzle exit were calculated, respectively, by the Boltzmann plot method.
