摘要
采用甘氨酸-硝酸盐法合成了La2NixCu1-xO4(x=0~0.5)复合氧化物,制成了厚膜型元件,研究了烧结温度、膜厚、介质粉含量等对材料氧敏性能的影响。测试结果表明:700℃烧结、膜厚为80μm、介质粉含量为5%的厚膜型La2NixCu1-xO4的氧敏性能最优,400℃时的灵敏度可以达到7.1。
Perovskite-type oxide La2 Nix CU1-xO4 (x =0-0.5 )is synthesized by the glycine-nitrates process (GNP). The thick film type oxygen-sensing sensor is fabricated. The effect of sintering temperatures, thickness and the content of glass powders on the oxygen-sensing properties of the thick films is investigated. The results illustrate that thick film La2 Ni0.1Cu0.9O4 (5 % glass powder,80 μm thickness, sintering at 700 ℃ exhibits the best oxygen-sensing properties and has a maximum sensitivity of 7.1 at 400℃.
出处
《传感器与微系统》
CSCD
北大核心
2009年第6期46-49,共4页
Transducer and Microsystem Technologies