摘要
介绍了一种新型MEMS双稳态微电磁驱动器,通过理论分析和有限元分析工具Ansys对器件的结构参数进行了优化设计,并证明了设计的可行性。利用金属基表面微加工技术与体硅微加工技术成功制作出这种驱动器,并对其弹性平台的弹性系数进行了标定,对驱动器的双稳态进行了调试。结果表明:此驱动器具有良好的双稳特性,响应时间短(约10m s)的特点。
A new type MEMS hi-stable electromagnetic actuator is presented. The parameters of the device are optimized by theoretical analysis and Ansys. The feasibility of the design is also proved. The bulk silicon micromachining and metal-based surface micromachining technology is used to fabricate this actuator. The elasticity coefficient of the device is measured, and so is the bi-stable characteristic of the MEMS micro-magnetic actuator. The results show that the device has good performance of bi-stable actuation, and the response time is short （about 10 ms）.
出处
《传感器与微系统》
CSCD
北大核心
2009年第6期117-120,共4页
Transducer and Microsystem Technologies
基金
国家自然科学基金资助项目(50405013)
国家"863"计划资助项目(2006AA04Z360)
关键词
微机电系统
电磁驱动
微电铸
湿法腐蚀
MEMS
electromagnetic actuator
micro-electroplating
wet etching
