压电双晶片作为驱动的精密定位机构研究

Study on Precision Positioning Mechanism Driven by PZT Bimorph

设计了一种用柔性铰链作为弹性导轨，压电双晶片作为驱动器，结合三角型放大原理实现的精密定位机构，并采用精密电感式微位移传感器（LVDT）进行位移检测。实验表明，该精密定位机构运动范围为0～25μm，定位精度达到15nm。

This paper presents an investigation about precision positioning mechanism, which used flexible hinge as flexible guide, piezoelectric bimorph as actuator, combined with the magnifying principle of triangular,and used linear variable differential transformer （LVDT） as displacement detection. The experiments show that the precise positioning mechanism’s motion range is 0～25μm, positioning accuracy is 15nm.