摘要
基于0.35μmSOI工艺平台,进行PDSOI CMOS标准单元建库技术研究。讨论选用H型栅和源漏非对称结构CMOS建立PDSOI标准单元的优点,根据0.35μm SOI CMOS工艺设计规则进行标准单元库设计,并设计了标准单元测试芯片。
Technique of PDSOI CMOS standard cell library building based on 0.35 μm SOI process is studied. A structure of H-gate and Asymmetric Source & Drain is presented and its advantages are discussed. A library of standard cell is designed according to 0.35 μm SOI CMOS design rule and test chips of standard cell are also designed.
出处
《科学技术与工程》
2009年第10期2597-2600,2606,共5页
Science Technology and Engineering
基金
西安应用材料创新基金项目(XA-AM-200606)资助