摘要
采用多弧离子镀技术制备高容量电容器用TiCxN1-x/Al复合铝箔电极,研究不同温度下TiCxN1-x/Al复合铝箔的比电容特性,并通过扫描电镜和X射线衍射分析不同温度下铝箔的表面微观结构和物相变化规律。结果表明,TiCxN1-x/Al复合铝箔的比电容高达1 600μF/cm2,经退火处理后,TiCxN1-x涂层表面颗粒有逐渐长大趋势,晶体结构也从非晶态向晶态转变,当退火温度高于200℃时,复合铅箔比电容下降较快。
A new TiCxN1-x/Al composite foil for capacitor was prepared by means of multi-arc ion plating technique. The specific capacitance of the composite foil under different temperatures was investigated, and the surface micrograph and phase transformation were analyzed with SEM and XRD. The results show that the specific capacitance of the TiCxN1-x/Al composite foil reach 1 600 μF/cm^2 at normal temperatures, and with higher temperature TiCxN1-xAl grains grow gradually and the microstructure changes from amorphous to crystalline. The specific capacitance of the composite foil decreases faster when the annealing temperature is above 200 ℃.
出处
《武汉科技大学学报》
CAS
2009年第3期251-254,共4页
Journal of Wuhan University of Science and Technology
基金
湖北省教育厅重点科研资助项目(Z200511007)
关键词
多弧离子镀
电容器
铝箔
比电容
multi-arc ion plating
capacitor
Al foil
specific capacitance